The mechanical properties of carbon nanotubes have been widely employed
to enhance the performance of atomic force microscopy
(AFM) cantilever tips. Utilizing the electromechanical
properties of carbon nanotubes, this paper investigates
the potential of using carbon nanotubes as active strain sensing
elements on AFM cantilevers.
A batch microfabrication process was
developed to construct silicon microcantilevers. Multi-walled
carbon nanotubes were dielectrophoretically assembly
between electrodes. Based on the characterization
results of 12 devices, the CNT-based cantilevers
demonstrated a linear relationship between resistance
changes and externally applied strain. The gauge factor
ranged from 78.84 to 134.40 for four different device
configurations.
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