My Research Work(in AMNL, U of T)

Towards carbon nanotube-based AFM cantilever

The mechanical properties of carbon nanotubes have been widely employed to enhance the performance of atomic force microscopy (AFM) cantilever tips. Utilizing the electromechanical properties of carbon nanotubes, this paper investigates the potential of using carbon nanotubes as active strain sensing elements on AFM cantilevers.


A batch microfabrication process was developed to construct silicon microcantilevers. Multi-walled carbon nanotubes were dielectrophoretically assembly between electrodes. Based on the characterization results of 12 devices, the CNT-based cantilevers demonstrated a linear relationship between resistance changes and externally applied strain. The gauge factor ranged from 78.84 to 134.40 for four different device configurations.



A 3-D solid model of CNT-based AFM cantilever.                               Microelectrodes with MWNTs assembled by DEP trapping



Carbon nanotubes DEP micromanipulation

MWNTs were DEP assembled onto microelectrodes under a MEMS testing probe station. After a droplet of MWNT solution (2μL) was placed between a pair of electrodes, the trapping voltage was continuously applied until the MWNT solution evaporated completely.





MEMS resonant sensors

Four kinds of MEMS resonant sensors were designed and fabricated, with the applications to force and mass measurement. The testing is in process.  




MEMS-based devices for studying cellular mechanobiology

Cells stretchers




Parallel Micropipette Aspirator Arrays for High-Throughput Mechanical Characterization of Biological Cells

Micropipette aspiration







Precision patterning of PDMS thin film and its applications

Under construction.







MEMS-based Nanomanipulator

MEMS-based nanomanipulator with a sub-nanometer resolution



E-Beam Lithography

E-beam Lithography




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