Project Title: RIE textured black silicon
Project Leader: Zahidur R Chowdhury
Supervisor: Prof. Nazir P. Kherani
Other Member(s): Nishanto Pishon [summer Student], Catherin Li [graduate student]
My role: Design of experiment, train members, supervise and direct them, RIE etching, characterizing the textured surface, and report writing.
Tools used: Phantom RIE Etcher / Perkin Elmer UV-VIS spectrophotometer / SEM / AFM / MATLAB / LATEX / Microsoft Office / Origin
Summary
- A novel texturization process has been developed to produce black silicon (silicon surface with very low reflectivity). Inverted pyramid textured surface and very rough surface can be produced by controlling the plasma process parameter. Reflectivity less than 10% has been measured for a broad band of light spectrum even without anti-reflection coating.
- Figure: (left) SEM image showing top view of the RIE processed inverted pyramid textured surface (right) measured reflectivity from the black silicon surface.